| 摘要 |
PURPOSE:To stabilize the shapes of fine patterns, such as through-holes of multilayered thick-film substrates by rotating plural substrate holders around one driving shaft and making development while simultaneously rotating each of the plural substrate holders around its driving shaft. CONSTITUTION:The plural substrate holders 5 are respectively provided with supporting shafts and connecting gears 1 and are rotated by a driving belt 2 when the driving shaft 3 rotates. The supporting shafts are supported to the driving shaft 3 by arm parts and make rotating motion around the driving shaft 3 when the driving shaft 3 rotates. Then, the substrate holders rotate freely around the supporting shafts when the driving belt 2 is not connected. The substrate holders simultaneously make revolving motion around the driving shaft 3 and rotating motion around the supporting shafts when the driving shaft 3 rotates if the driving belt 2 is connected to the holders. As a result, the shapes of the tapered parts around the through-holes of the multilayered thick-film substrates are stabilized to the same shape. |
