OPTICAL INTEGRATED CIRCUIT AND SECOND HARMONIC GENERATOR

摘要

PURPOSE:To improve the heat radiation of the hybrid optical integrated circuit and to eliminate the peeling and optical axis mis-alignment by heat cycles by forming a semiconductor laser and optical parts consisting of waveguides of LiNbO3 and LiTaO3 by hybrid integration on a substrate consisting of SiC, AIN or diamond. CONSTITUTION:The semiconductor laser 2 and the LiTaO3 waveguide 3 are directly coupled on the SiC substrate 1 by disposing the active layer 4 of the semiconductor laser 2 and the waveguide layer 5 of the LiTaO3 waveguide 3 on a lower side. The need for position adjustment of a Z-axis on the basis of the reference plane is eliminated and the position adjustment is carried out while the output power of guided light is monitored only in the x-axis direction and the y-axis direction in order to optically couple the exit light from the semiconductor laser 2 to the waveguide layer 5. Fixing of the LiTaO3 waveguide 3 and the SiC substrate 1 is executed by soldering after the optical axis adjustment. As a result, the substrate which has the good thermal conductivity and radiates heats well is obtd. The optical integrated circuit which functions stably even if the high-output semiconductor laser is used is obtd.