发明名称 METHOD OF FORMING LONG AND NARROW COMPONENT
摘要 PURPOSE: To provide the approximately slender structure member, which has at least one structure member for a minute mechanism, especially, a thin wing extending in the approximately vertical direction to a substrate and can have the cross section in a wide range. CONSTITUTION: A sacrificial layer 32 comprising the first raw material on a substrate 12, on which the approximately flat upper surface is provided, is molded in the specified shape. A thin layer 44 comprising the second raw material is molded on the surface. After the layer is molded to the required shape, the sacrificial layer is removed.
申请公布号 JPH06216083(A) 申请公布日期 1994.08.05
申请号 JP19930297631 申请日期 1993.11.04
申请人 C S UU M CENTRE SWISS ELECTRON E DE MIKUROTEKUNIKU SA RECH E DEV 发明人 JIYANNMARUKU MORE
分类号 H01L21/302;B81B3/00;C23C16/01;H01H1/00;H01L21/3065;(IPC1-7):H01L21/302 主分类号 H01L21/302
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