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发明名称
Vorrichtung und Verfahren zur Erzeugung eines Vakuums.
摘要
申请公布号
DE68913351(T2)
申请公布日期
1994.08.04
申请号
DE19896013351T
申请日期
1989.05.23
申请人
THE BOC GROUP, INC., MURRAY HILL, N.J., US
发明人
MORGAN, STEVEN V., WINDSOR CALIFORNIA 95492, US;MADOCKS, JOHN E., OAKLAND CALIFORNIA 94619, US
分类号
F04B39/00;F04B37/14;F04B49/06;(IPC1-7):F04B37/14;F04B41/06
主分类号
F04B39/00
代理机构
代理人
主权项
地址
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