SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, POLISHING METHOD, POLISHING APPARATUS AND RECOVERING METHOD OF POLISHED SURFACE OF THE SAME APPARATUS,申请号JP19930284118-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, POLISHING METHOD, POLISHING APPARATUS AND RECOVERING METHOD OF POLISHED SURFACE OF THE SAME APPARATUS
摘要
申请公布号	JPH06216096(A)	申请公布日期	1994.08.05
申请号	JP19930284118	申请日期	1993.10.20
申请人	TOSHIBA CORP	发明人	KODERA MASAKO;YANO HIROYUKI;SHIGETA ATSUSHI;YAJIMA HIROMI;AOKI RIICHIRO
分类号	H01L21/304;H01L21/3205;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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