发明名称 |
PHASE SHIFTING MASK STRUCTURE WITH MULTILAYER OPTICAL COATING FOR IMPROVED TRANSMISSION |
摘要 |
A multi-layer PSM structure with multi-layer optical coating disposed between a quartz substrate and a surrounding medium, which typically is air. The multi-layer coating is comprised of a high index of refraction material overlying the quartz and a lower index of refraction material overlying the first. The multi-layer coating essentially functions as an anti-reflective coating to reduce scattering and reflection at the interface boundaries. |
申请公布号 |
WO9417449(A1) |
申请公布日期 |
1994.08.04 |
申请号 |
WO1993US11514 |
申请日期 |
1993.11.29 |
申请人 |
SEMATECH, INC. |
发明人 |
VASUDEV, PRAHALAD, K.;LOW, KAH, KUEN |
分类号 |
G03F1/26;G03F1/30 |
主分类号 |
G03F1/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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