Etching, pickling or developing appts. esp. for fine structuring

摘要

Appts. for etching, pickling or developing flat objects, esp. electronic circuit boards, has a conveyor system for continuously moving the objects through a treatment chamber and nozzles arranged the path of the objects for directing treatment liq. at a certain divergence angle onto the objects.The novelty is that (a) the nozzle openings (18) are spaced by only a few cm. from the path of the objects (2); and (b) the nozzles (15-17) are designed so that the divergence angle does not exceed 43 deg. and the impingement pressure of the liq. jets is constant at all points on the objects (2).Pref. the distance between the nozzle openings (18) and the path of the objects (2) is 1-2 cm. and the divergence angle is 15-45 deg.