PRESSURE SENSOR

摘要

A pressure sensor has a substrate (21) and a layer (25) which defines together with the substrate a pressure sensor cavity (24). The layer has a diaphragm-like area (26) upon which an outer pressure may be applied. In order to create a microminiaturized pressure sensor of the above-mentioned type for differential or relative pressure measurements, a channel (27) which extends along the surface of the substrate is connected to the cavity. The channel has a layered structure which also includes the layer which defines the diaphragm-like area of the pressure sensor. The relation between the width of the channel and the thickness of the layered structure (25, 30) above the channel is smaller than the relation between the smallest dimension of the diaphragm-like area in the plane of the diaphragm and the thickness of the diaphragm-like area.