Surface shape measurement device.

摘要

A surface shape measurement device for measuring a surface shape of a measurement subject. The device includes a scanner for scanning the surface of the measurement subject with a light point, a lens for focusing an image of the light point on the surface of the measurement subject and a slit plate arranged at a position of a focal plane of the light point and having a plurality of apertures on a locus of the image of the light point. The device further includes a photoelectric converter arranged at a position to receive the light passing through the aperture for converting the light into a pulse signal and a signal processing circuit connected to receive the pulse signal for determining a position of the light point on the surface of the measurement subject based on a time-point of generation of the pulse signal, whereby the surface shape of the measurement subject is measured based on the position determined by the signal processing circuit. <IMAGE>