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发明名称
摘要
申请公布号
JPH0658916(B2)
申请公布日期
1994.08.03
申请号
JP19870218820
申请日期
1987.08.31
申请人
发明人
分类号
H01L29/205;H01L21/331;H01L29/72;H01L29/73;H01L29/737;(IPC1-7):H01L21/331
主分类号
H01L29/205
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