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发明名称
摘要
申请公布号
JPH0658900(B2)
申请公布日期
1994.08.03
申请号
JP19860148311
申请日期
1986.06.26
申请人
发明人
分类号
H01L21/28;H01L21/285;(IPC1-7):H01L21/285
主分类号
H01L21/28
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