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经营范围
发明名称
摘要
申请公布号
JPH0658880(B2)
申请公布日期
1994.08.03
申请号
JP19850253946
申请日期
1985.11.12
申请人
发明人
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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