| 摘要 |
<p>A metallic material which is excellent in the resistance to chemical solution capable of composing a chemical solution treating device free of erosion on metallic piping, metallic devices, and metallic parts thereof as well as capable of controlling the flow rate of solution with high precision and free of pollution by chemical solution; and also intends to provide a chemical solution treating device or parts thereof using said metallic materials. The material is characterized by being provided with at least a basic member (101) composed of a metallic material, a metal fluoride layer or metal oxide layer (102) formed on the basic member (101) and fluorocarbon film (103) to cover said metal fluoride layer or metal oxide layer (102). <IMAGE></p> |
