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发明名称
CONTINUOUS VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH06212424(A)
申请公布日期
1994.08.02
申请号
JP19930003800
申请日期
1993.01.13
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
MATSUDA SHIKO;NEHASHI KIYOSHI
分类号
C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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