Vibrating beam accelerometer

摘要

A vibrating beam accelerometer contains an inner structure having a vibrating beam extending between a pair of isolator masses which are connected via isolator beams to a pair of structures, an outer structure having flexure beams extending between a mount structure and a proof mass structure and a peripheral seal structure surrounding said inner structure and said outer structure. Seal plates containing a ring of glass frit material sandwich the above assembly. An electrode pattern termination extends from the above assembly, through the ring of glass frit material, to electronic circuitry containing an oscillator.