| 摘要 |
PURPOSE:To finish a material of high hardness or hard and brittle material to have a mirror surface easily by finely positioning a grinding wheel spindle having a grinding wheel at a resolution of a sub-micron or less. CONSTITUTION:A piezoelectric element is inside a fine positioning device 3, and by expanding this piezoelectric element, the fine positioning device 3, a grinding wheel spindle 1, and a grinding wheel 2 are displaced to generate a cut in a work. The piezoelectric element is capable of obtaining a positioning resolution, so the grinding wheel can cut the work at the resolution of a sub- micron or less. Because of this provision of the grinding wheel spindle 1, and the positioning device 3 to position the grinding wheel spindle 1 finely at the resolution of a sub-micron or less, the grinding wheel spindle 1 can be finely positioned at the resolution of a sub-micron or less. A plain surface, a spherical, or a non-spherical surface can thus be grinding-finished to have a mirror surface easily. |
