发明名称 Surface treatment of indium phosphide utilizing chemical roughening of the surface
摘要 A surface (30) of a wafer of indium phosphide (22) is treated by first etching the surface (30) with an aqueous solution of nitric acid and ceric ammonium nitrate. A toughening solution of about 4 parts by volume of acetic acid, about 4 parts by volume nitric acid, and about 1 part by volume hydrobromic acid is prepared and mixed. The roughening solution is contacted to the etched surface (30) of the wafer of indium phosphide (22) for about 15 to about 30 seconds to roughen the surface of the indium phosphide. Reaction products may be removed from the surface in aqueous hydrofluoric solution, and metal may be deposited upon the toughened surface in a strongly adhering layer (28).
申请公布号 US5334284(A) 申请公布日期 1994.08.02
申请号 US19930134129 申请日期 1993.10.12
申请人 HUGHES AIRCRAFT COMPANY 发明人 NGO, CATHERINE
分类号 H01L21/306;H01L21/78;(IPC1-7):H01L21/00 主分类号 H01L21/306
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