发明名称 Suppression of graphite formation during laser etching of diamond
摘要 Graphite formation on a diamond surface during laser etching is inhibited or the graphite is removed by contact with a gaseous material such as elemental hydrogen, elemental oxygen, an inert gas or a source of hydroxyl radicals. Preferably, the article being etched is cooled and maintained in an inert atmosphere during etching.
申请公布号 US5334280(A) 申请公布日期 1994.08.02
申请号 US19930064465 申请日期 1993.05.21
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS R.;FLEISCHER, JAMES F.
分类号 H01L21/3065;(IPC1-7):H01L21/306 主分类号 H01L21/3065
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