,申请号JP19750027118-传众专利搜索

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发明名称
摘要
申请公布号	JPS5513340(B2)	申请公布日期	1980.04.08
申请号	JP19750027118	申请日期	1975.03.07
申请人		发明人
分类号	G03F7/004;C08F20/00;C08F20/32;C08F220/00;C08F220/10;G03F7/039;H01L21/027	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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