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发明名称
SPUTTERING OR ETCHING METHOD
摘要
申请公布号
JPH06212420(A)
申请公布日期
1994.08.02
申请号
JP19930020629
申请日期
1993.01.13
申请人
SHIN ETSU CHEM CO LTD
发明人
OHASHI TAKESHI
分类号
C23C14/35;C23F4/00;H01L21/203;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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