INSTALLATION FOR DOPING OF SEMICONDUCTORS IN CORONA DISCHARGE,申请号SU19904848328-传众专利搜索

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发明名称	INSTALLATION FOR DOPING OF SEMICONDUCTORS IN CORONA DISCHARGE
摘要
申请公布号	RU2017264(C1)	申请公布日期	1994.07.30
申请号	SU19904848328	申请日期	1990.07.09
申请人	KONTSERN "ZEJF"	发明人	KREMNEV ANATOLIJ A
分类号	H01L21/225;(IPC1-7):H01L21/225	主分类号	H01L21/225
代理机构		代理人
主权项
地址

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