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发明名称
METHOD OF MANUFACTURE OF LSI CIRCUITS BASED ON VALVE MATRIXES
摘要
申请公布号
RU2017266(C1)
申请公布日期
1994.07.30
申请号
SU19904890991
申请日期
1990.12.17
申请人
NAUCHNO-ISSLEDOVATELSKIJ INSTITUT ELEKTRONNOJ TEKHNIKI
发明人
MESHCHERYAKOV NIKOLAJ YA;TSYBIN SERGEJ A
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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