发明名称 PROCEDE ET DISPOSITIF DE MARQUAGE ET DE CLIVAGE DE PLAQUETTES DE MATERIAUX SEMI-CONDUCTEURS MONOCRISTALLINS
摘要 <p>According to the invention, in order to mark a reference direction on a wafer of a low hardness monocrystalline semiconductor material, an imprint (1) is formed on the useful surface of the wafer in a non-useful area of this surface, the imprint revealing at least one direction from which the reference direction (9, 11, 13) is derived, and the latter is marked by a line in the non-useful area. With the reference direction corresponding to a cleavage plane of the wafer, the latter is furthermore cleaved by marking a cleavage line along the reference direction on the other surface of the wafer. …<IMAGE>… </p>
申请公布号 FR2648274(B1) 申请公布日期 1994.07.29
申请号 FR19890007537 申请日期 1989.06.07
申请人 COMMISSARIAT A ENERGIE ATOMIQUE 发明人 GERARD PETROZ
分类号 H01L21/301;B28D5/00;H01L21/00;H01L21/304;H01L23/544;(IPC1-7):H01L21/80 主分类号 H01L21/301
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