发明名称 Verfahren zur Abscheidung einer keramischen Dünnschicht und danach hergestelltes Produkt.
摘要 <p>Process for depositing a ceramic composition as a thin film on a substrate, comprising the following stages: … …  - dissolving the base constituents of the ceramic composition which are introduced in simple or complexed form, in a solvent, …  - adding acetylacetone and hexamethylenetetramine to the solution obtained previously, in proportions which are suitable for the deposition method chosen, …  - aging or polymerising the substance obtained in the preceding stage, …  - depositing the substance in the form of a layer on the substrate, …  - optionally drying the deposited layer if a number of depositions are necessary, …  - low-temperature sintering of the deposited layer or layers. … …<??>Application to the electronics industry.</p>
申请公布号 DE69007757(T2) 申请公布日期 1994.07.28
申请号 DE1990607757T 申请日期 1990.11.16
申请人 THOMSON-CSF, PARIS, FR 发明人 VALENTE, ISABELLE, F-92045 PARIS LA DEFENSE, FR;FAURE, SYLVAIN, F-92045 PARIS LA DEFENSE, FR;GAUCHER, PHILIPPE, F-92045 PARIS LA DEFENSE, FR;LIVAGE, JACQUES, F-92045 PARIS LA DEFENSE, FR
分类号 C04B41/52;C04B41/89;C23C18/12;H01L21/00;H01L21/314;H01L21/316;(IPC1-7):C23C18/12;C04B41/50 主分类号 C04B41/52
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