发明名称 |
Verfahren zur Abscheidung einer keramischen Dünnschicht und danach hergestelltes Produkt. |
摘要 |
<p>Process for depositing a ceramic composition as a thin film on a substrate, comprising the following stages: … … - dissolving the base constituents of the ceramic composition which are introduced in simple or complexed form, in a solvent, … - adding acetylacetone and hexamethylenetetramine to the solution obtained previously, in proportions which are suitable for the deposition method chosen, … - aging or polymerising the substance obtained in the preceding stage, … - depositing the substance in the form of a layer on the substrate, … - optionally drying the deposited layer if a number of depositions are necessary, … - low-temperature sintering of the deposited layer or layers. … …<??>Application to the electronics industry.</p> |
申请公布号 |
DE69007757(T2) |
申请公布日期 |
1994.07.28 |
申请号 |
DE1990607757T |
申请日期 |
1990.11.16 |
申请人 |
THOMSON-CSF, PARIS, FR |
发明人 |
VALENTE, ISABELLE, F-92045 PARIS LA DEFENSE, FR;FAURE, SYLVAIN, F-92045 PARIS LA DEFENSE, FR;GAUCHER, PHILIPPE, F-92045 PARIS LA DEFENSE, FR;LIVAGE, JACQUES, F-92045 PARIS LA DEFENSE, FR |
分类号 |
C04B41/52;C04B41/89;C23C18/12;H01L21/00;H01L21/314;H01L21/316;(IPC1-7):C23C18/12;C04B41/50 |
主分类号 |
C04B41/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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