| 发明名称 |
SiO2 electret and its manufacturing process. |
| 摘要 |
<p>In order to manufacture a SiO2 electret, SiO2 (10) is deposited on a solid substrate (5) by vapour phase deposition from a suitable plasma, and the deposit thus produced is heat-treated by heating to a temperature of greater than 100@C for a length of time greater than 1 hour, and the deposit thus treated is finally charged electrically. <IMAGE></p> |
| 申请公布号 |
EP0608162(A1) |
申请公布日期 |
1994.07.27 |
| 申请号 |
EP19940400075 |
申请日期 |
1994.01.12 |
| 申请人 |
LEWINER, JACQUES;PERINO, DIDIER |
发明人 |
LEWINER, JACQUES;PERINO, DIDIER |
| 分类号 |
C23C16/56;C23C16/40;H01G7/02;H04R19/01;(IPC1-7):H01G7/02 |
主分类号 |
C23C16/56 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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