| 摘要 |
An analyzer capable of detecting a light element, such as Na, capable of evaluating a sample having an uneven surface, such as pattern-carrying wafer without destroying and damaging the same, with simple construction and simple operation, and safely to the human body, and capable of identifying the composition of a minute amount of impurities and fine particles deposited on the surface of a sample. This analyzer is characterized in that it has a sample retaining stage, an ultraviolet ray-emitting light source, a means for collecting the ultraviolet rays sent out from the light source and applying the resultant rays to the surface of a sample, and a means for detecting the light emitted from the surface of the sample to which the ultraviolet rays have been applied. <IMAGE> |
