| 摘要 |
PURPOSE:To improve precision by connecting divided waveguide pattern masks during projection exposure and forming the whole pattern. CONSTITUTION:The optical integrated circuit is formed by using a mask 7 with a single-element pattern in which cross waveguides 2a and straight waveguides 2b are at constant pitch (d) at both ends as an optical waveguide pattern. When moving exposure is carried out by using the mask 7, optical waveguide patterns are connected while shifting by one pitch. The optical integrated circuit is a 1X4 switching which inputs light as shown by an arrow and outputs the light as shown by arrows out1-out4. Thus, the exposure is performed to reduce the size of the mask, so the precision of the fine pattern of an intersection of waveguides is improved and a shift in the position of an electrode is reduced. |
