| 摘要 |
PURPOSE:To further reduce the stroke of a sensor array and to improve the sensitivity by using individual sensors which meet a requirement shown by a specific expression. CONSTITUTION:Plural slits 12 which are open to one edge of a pyroelectric body substrate 11 are formed so as to divide the pyroelectric body substrate 11 into pyroelectric body substrates 11 as pyroelectric bodies of individual sensors. Then, a lead-out electrode 13 is formed on surface of the pyroelectric body part of each sensor and a lead-out electrode 14 is formed on the other surface. A light absorbing film 15 is formed on the top surface side so that the lead-out electrode 12 and pyroelectric body part are covered. Then, electrodes 14 on reverse surface sides are connected to one another and electrodes 13 on top surface sides are led out, sensor by sensor. Then, the individual sensors satisfy the condition shown by the expression (AC: sectional area of pyroelectric body substrate, KC: heat conductivity, Ae: sectional area of lead-out electrode, Ke: heat conductivity), so the stroke of the heat conduction of the lead-out electrodes 13 and 14 is reduced greatly and the sensitivity of the sensors is increased. |
