摘要 |
<p>A semiconductor device having a semiconductor layer, in which an active device such as a MOS or bipolar transistor in the front surface area of the semiconductor layer, and a device for communicating the front and rear surfaces of the semiconductor layer is formed therein in connection with one of the electrodes of the active device and exposes to a groove formed in the rear surface of the semiconductor layer. A three-dimensional semiconductor device including at least two semiconductor devices stacked one on another is also disclosed.</p> |