MICROMINIATURIZED ELECTROSTATIC PUMP

摘要

A Microminiaturized Electrostatic Pump An electrostatic pump includes two electrodes, which are spaced apart essentially in the pump flow direction and which are adapted to have applied thereto a potential for injecting an ion current flowing between said electrodes. For further microminiaturization of the pump, said pump includes in accordance with the present invention two semiconductor components, which are arranged one on top of the other in the pump flow direction and which are structured in such a way that the electrodes form an integral constituent part of said semiconductor components.