| 摘要 |
PURPOSE:To provide the antireflection film having excellent adhesion, durability, optical characteristics and mass productivity by forming a silicon monoxide film of a first layer, a tantalum oxide layer of a second layer and silicon dioxide layer of a third layer on the surface of a plastic substrate and introducing gaseous oxygen at the time of forming the first layer and the second layer. CONSTITUTION:The silicon monoxide film 2, the tantalum oxide layer 3 and the silicon dioxide film 4 are formed in this order on the acrylic resin substrate 1. The silicon monoxide film 2 of the first layer is formed by evacuating the inside of a vacuum vapor deposition chamber, then introducing the prescribed amt. of oxygen therein and forming the m of the silicon monoxide at a prescribed vapor deposition to a thickness of l0/4 (lambda0=520nm) optical fiber thickness. The prescribed amt. of the oxygen is then introduced into the chamber and the film of the tantalum oxide is formed at the prescribed vapor deposition rate to the thickness of lambda0/4 optical film thickness. The introduction of the oxygen is then stopped and the film of the silicon dioxide is formed at the prescribed vapor deposition rate to the thickness of lambda0/4 optical film thickness. As a result, the adhesion to the plastic substrate 1 is assured by the first layer 2 and the optical properties are maintained by the second layer 3. The wear resistance is improved by the third layer 4. |
