| 发明名称 |
Robot prealigner |
| 摘要 |
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
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| 申请公布号 |
US5332352(A) |
申请公布日期 |
1994.07.26 |
| 申请号 |
US19920863819 |
申请日期 |
1992.04.06 |
| 申请人 |
ADE CORPORATION |
发明人 |
PODUJE, NOEL S.;MALLORY, ROY S. |
| 分类号 |
B25J9/10;B25J9/04;B25J9/16;B25J13/08;B25J19/00;B25J19/02;G05D3/00;H01L21/67;H01L21/677;H01L21/68;(IPC1-7):B25J9/06 |
主分类号 |
B25J9/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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