| 摘要 |
<p>PURPOSE:To effectively and swiftly remove a thin film material eluted from a boundary between a cleaning part and a thin-film part by using a small amount of solvent. CONSTITUTION:On the surface side of the edge of a rectangular substrate 1 in which a thin film is formed on the surface thereof and which is held by a substrate holding means, a first surface-side solvent nozzle 26b is prepared for dissolving unnecessary thin film by applying a solvent, and a surface-side gas nozzle 27b is also prepared to blow the dissolved substance away from the edge of the substrate 1 through gas jetting, further a second surface-side solvent nozzle 28b is prepared in a manner to applying a solvent on the position near the edge side of the substrate 1 than the applying position of the nozzle 26b, thereby dissolving/removing the residue such as thin film material, etc., eluted from the boundary part.</p> |
