| 摘要 |
PURPOSE:To provide an image position corrector which allows processing in a short time with respect to three ways of correction--angular correction, correction in the X-axis and correction in the Y-axis. CONSTITUTION:This apparatus includes an image data processing means 14 to convert an image signal of a specimen 12 inputted to an real image data as digital signal, a memory means 20 to store the real image data obtained by the image data processing means 14 as data on a two-dimensional virtual coordinate comprising a first axis and a second axis at the right angle to the first axis and a control means 16 to determine a synthetic data of a component in the first axis of a correction data and a synthetic data of the component in the second axis through an arithmetic means 18. |
