发明名称 DISCRIMINATING DEVICE FOR PROPERIETY OF ULTRASONIC WIRE BONDER
摘要 PURPOSE:To discriminate the propriety of bonded states of metallic wires to bonding sections by means of a wire bonder using an ultrasonic wiring bonding method during the course of wire bonding. CONSTITUTION:In this ultrasonic wire bonder in which an ultrasonic vibrator element 6 for resonantly vibrating a capillary tool 1 is attached to a horn 3 constituted so that the horn 3 can press the capillary tool 1 which is fitted to the front end of the horn 3 and through which a metallic wire 2 is passed against a bonding section, the element 6 is connected to an ultrasonic wave detection circuit 11 through an amplifier 10.
申请公布号 JPH06209031(A) 申请公布日期 1994.07.26
申请号 JP19930002822 申请日期 1993.01.11
申请人 ROHM CO LTD 发明人 FUJII TOSHIFUMI;NAKAMURA TOSHIO;OKUMURA HIROMORI
分类号 H01L21/607;H01L21/60;H01L21/66 主分类号 H01L21/607
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