发明名称 |
DISCRIMINATING DEVICE FOR PROPERIETY OF ULTRASONIC WIRE BONDER |
摘要 |
PURPOSE:To discriminate the propriety of bonded states of metallic wires to bonding sections by means of a wire bonder using an ultrasonic wiring bonding method during the course of wire bonding. CONSTITUTION:In this ultrasonic wire bonder in which an ultrasonic vibrator element 6 for resonantly vibrating a capillary tool 1 is attached to a horn 3 constituted so that the horn 3 can press the capillary tool 1 which is fitted to the front end of the horn 3 and through which a metallic wire 2 is passed against a bonding section, the element 6 is connected to an ultrasonic wave detection circuit 11 through an amplifier 10. |
申请公布号 |
JPH06209031(A) |
申请公布日期 |
1994.07.26 |
申请号 |
JP19930002822 |
申请日期 |
1993.01.11 |
申请人 |
ROHM CO LTD |
发明人 |
FUJII TOSHIFUMI;NAKAMURA TOSHIO;OKUMURA HIROMORI |
分类号 |
H01L21/607;H01L21/60;H01L21/66 |
主分类号 |
H01L21/607 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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