发明名称 Temperature control system for lamp annealer
摘要 A system for controlling the temperature of a lamp annealer which system comprises a group of lamps for heating an article to be heated, a radiation thermometer for measuring the temperature of the article, and a lamp output conroller for controlling the output of the lamps based on the output of the thermometer, the controller having stored therein a target temperature control pattern. The system is adapted to effect open-loop control by controlling the lamp output according to a predetermined lamp output control pattern until the thermometer reaches a specified temperature range enabling closed-loop control and not lower than the lowest temperature measurable by the thermometer, to compare the gradient of temperatures measured by the thermometer with the gradient of the target temperature control pattern to determine the ratio of the former to the latter after the output of the thermometer has reached the temperature range, to continue the open-loop control while the gradient ratio is smaller than a predetermined control change-over reference value, and to perform closed-loop control by controlling the lamp output after the gradient ratio has increased to not smaller than the reference value so that the temperature measured matches the target temperature control pattern.
申请公布号 US5332883(A) 申请公布日期 1994.07.26
申请号 US19920905433 申请日期 1992.06.29
申请人 KOYO SEIKO CO., LTD. 发明人 HIGASHIRA, HIDEKI
分类号 F27B17/00;G05D23/27;H01L21/00;H01L21/26;H05B3/00;(IPC1-7):H05B1/02 主分类号 F27B17/00
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