USE OF PLASMA REACTION DEVICE,申请号JP19930002680-传众专利搜索

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发明名称	USE OF PLASMA REACTION DEVICE
摘要
申请公布号	JPH06208971(A)	申请公布日期	1994.07.26
申请号	JP19930002680	申请日期	1993.01.11
申请人	MITSUBISHI ELECTRIC CORP	发明人	FUJIWARA NOBUO
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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