| 摘要 |
PURPOSE:To uniformly polish the whole regions on both the surfaces by installing a plurality of polishing bodies, permitting rotation and revolution, on the upper and lower part supporting members arranged in separation and contact, and by laterally shifting and revolving a polished article, operating each polishing body in the state where the polished article is interposed between the upper and lower polishing bodies. CONSTITUTION:In the state where the upper and lower part supporting members 11 and 12 are separated, a plate shaped article 78 as workpiece is fitted into a fitting hole 77 on a holding carrier 60 and is set. Then, a cylinder 22 is operated to lower the upper part supporting member 12 through an elevator frame 17, and polishing bodies 53 and 54 supported on the upper part supporting member 12 are set in light contact on the upper surface of the plate shaped article 78. Each motor 26, 46 is driven, and each disc shaped polishing body 53, 54 which is supported on each supporting member 11, 12 is allowed to rotate and revolve, and a slide table 63 is moved in reciprocation along a guide rod 61, and holding ring 70 is revolved by the supporting guide of a roller 71 group. Both the surfaces of the plate shaped article 78 are polished by the polishing bodies 53 and 54 by the combination of the above-described movements. |
