REMOVING NON-REACTIVE GAS AND REACTION RESTRAINT APPARATUS

摘要

The apparatus is for suppressing reaction of gas remaining in a reaction tube in the form of positive or negative ion and for removing particle sources. The apparatus includes a MF (19) and a valve (10) for stopping gas supply when a layer is growth sufficiently, a pump (4) for ventilating ionized gas remaining in a tube (8), a plate electrode (13) for coupling the remnant ionized gas, and a main controller (11) for controlling current supplied to the plate electrode (13).