MANUFACTURE OF PIEZOELECTRIC VIBRATOR

摘要

PURPOSE:To reduce the heat generation at processing and to obtain the adjustment method of a resonance frequency with high accuracy and without deterioration in the material and the characteristic of the piezoelectric vibrator with respect to the manufacture of a piezoelectric element in which part of the piezoelectric vibrator is removed to adjust the resonance frequency of the piezoelectric vibrator. CONSTITUTION:A piezoelectric vibrator 1 is formed to be a paper-tablet in which an electrode 2 is provided to opposite faces, and the lengthwise vibration displacing the length of the vibrator 1 is stimulated by applying an AC electric field to the electrode 2. The resonance frequency of the lengthwise vibration depends on a type of material and the length of the element of the piezoelectric vibrator 1. Thus, an end face of the piezoelectric vibrator 1 is processed to scrape the piezoelectric material with a laser beam by DELTAt each DELTAt is smaller than a laser beam diameter) from the end face. Thus, the production of residual material due to processing is prevented and the processing time is reduced and the manufacture with less thermal deterioration is obtained.