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发明名称
MONOLITHIC INTEGRATED CIRCUIT FOR MILLIMETER WAVE AND MANUFACTURE OF SAID INTEGRATED CIRCUIT
摘要
申请公布号
JPH06204409(A)
申请公布日期
1994.07.22
申请号
JP19930143387
申请日期
1993.06.15
申请人
DAIMLER BENZ AG
发明人
HANSU BURUTSUGAA
分类号
H01L21/331;H01L21/8232;H01L21/8252;H01L27/06;H01L27/095;H01L29/73;(IPC1-7):H01L27/06
主分类号
H01L21/331
代理机构
代理人
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