发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To improve bonding strength without having a wire-bonding part jutting out from an electrode pad by widening the area of wire bonding part against the electrode pad. CONSTITUTION:In a wire-bonding device 10, a plurality of piezo-electric elements 31 to 34, which will be adjacently arranged with each other on a plurality of positions in the circumferential direction of a capillary 10 on the capillary retaining part 17A of a bonding arm 17, are provided and a voltage supply part, which supplies voltage of prescribed positional deviation with each other, to the piezoelectric elements 31 to 34, is provided.
申请公布号 JPH06204302(A) 申请公布日期 1994.07.22
申请号 JP19920360958 申请日期 1992.12.29
申请人 TOSHIBA SEIKI KK 发明人 SHINKAWA TAKEYUKI
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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