摘要 |
<p>PURPOSE:To easily manufacture an electron emitting cold cathode having a surface structure suited for emitting an electron. CONSTITUTION:A vacuum microelement for performing action similar to a vacuum tube, by using a cold cathode 9 as the cathode, anode 7 as the anode and a draw out electrode 5 as the grid, is manufactured. The columnar cold cathode 9 is formed by rhombic evaporation of metal. By the rhombic evaporation, many fine columnar protrusions are formed in an upper surface of the cold cathode 9, and an electron is emitted from these columnar protrusions.</p> |