| 摘要 |
PURPOSE:To reduced the area to be polish so as to shorten the time of polishing by providing a step at the face, which contact with a mover, of an elastic body. CONSTITUTION:An ultrasonic motor is equipped with a piezoelectric substance 2, which is vibrated by a drive signal, an elastic substance 1, where progressive waves are generated by the excitation of the piezoelectric substance, and a mover 4, which is driven by the progressive waves generated in the elastic body, and at the face on move side of the elastic body are formed a first face 1b, which contacts with the mover, and second faces 1c and 1d, which are lower than the level of the first face, with a step of about 0.3mm. And, the first face is polished and the second face is not polished. |
