| 摘要 |
PURPOSE: To provide a plating bath electric characteristic monitoring device which can quickly separate DC components from AC components measured by a working electrode by rapidly supplying necessary signals to a counter electrode, a reference electrode, and the working electrode. CONSTITUTION: This device includes a probe 24 having a counter electrode 26, a reference electrode 30, and a working electrode 28; an input signal generator 10 selectively providing a DC bias of predetermined amplitude and frequency or an offset signal and an AC signal and electrically connected to the counter electrode 26; and a signal detection means electrically connected to the working electrode 28 in order to detect both the DC and AC signals supplied to the probe 24 by the counter electrode 26, so as to further monitor the current detected by the working electrode 28. The signal detection means includes at least one filter network 58 having a predetermined filter range. |
