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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06204217(A)
申请公布日期
1994.07.22
申请号
JP19920360523
申请日期
1992.12.29
申请人
MITSUMI ELECTRIC CO LTD
发明人
TSUZAKI YASUNORI
分类号
H01L21/3205;H01L21/768;(IPC1-7):H01L21/320;H01L21/90
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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