| 摘要 |
PURPOSE:To expose and record a lattice type pattern image on a substrate, with the minimum pitches, by recording interference fringes by two soft X-rays of parallel waves, on an X-ray sensitive substrate, as a soft X-ray image having a lattice type pattern. CONSTITUTION:On the basis of a soft X-ray 32, soft X-rays 34, 35 obtained from a soft X-ray printer 33 are supplied to optical systems 36, 37 for forming parallel waveforms, thereby obtaining soft X-rays 38, 39 of parallel waves whose wave surfaces are uniform. On the basis of the soft X-rays 38, 39, their interference fringes 40 is obtained on an X-ray sensitive substrate 44 which has X-ray sensitivity by arranging an X-ray sensitive layer 45 on the surface, by using soft X-ray plane reflecting mirrors 42 and 43. Hence the X-ray sensitive substrate 44 is exposed to the interference fringes 40, which are recorded on the X-ray sensitive substrate 44, as a soft X-ray image having a lattice type pattern. Thereby the image having a lattice type pattern can be obtained on the substrate, so as to have the minimum pitches. |
