发明名称 WIRE AUTOMATIC FEEDING DEVICE FOR WIRE BONDER
摘要 PURPOSE:To prevent stress from applying to a wire more than required by maintaining a constant linear relation between the drawing out direction of a wire from a wire spool and the position of a bonding head. CONSTITUTION:A wire spool 3 is mounted to a shaft of a rotary motor 4. The rotary motor 4 is threaded with a screw 5 and mounted with a nut 7. The wire spool 3 moves in both directions with the nut 7 by turning the screw 5 mounted to the shaft of a transfer motor 6. This construction makes it possible to keep the constant linear relation between the drawing out direction of a wire 2 and a bonding head 1 by moving the wire spool 3 in conformity with the movement of the bonding head 1.
申请公布号 JPH06204279(A) 申请公布日期 1994.07.22
申请号 JP19920061632 申请日期 1992.03.18
申请人 NEC KYUSHU LTD 发明人 NAGAI SHINICHI
分类号 H01L21/60 主分类号 H01L21/60
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