| 摘要 |
<p>PURPOSE:To furnish a semiconductor device for detecting a position of incidence which can output information on the position of incidence of light or a particle beam as a current or the like. CONSTITUTION:Seven conductive layers 31 to 37 are formed on a semiconductor substrate 1. These conductive layers 31 to 37 have the same concentration of impurities of the same conductivity type respectively and the thicknesses thereof are thinned gradually toward the inside. Therefore the respective resistances between the opposite ends of the conductive layers 31 to 37 are equal to one another. Holes generated by incidence of a spot light flow into the conductive layers 31 to 37 of a P type and divided to position signal electrodes 2a and 2b in the resistance ratio corresponding to the angle of a point of inflow. Accordingly, it is possible to detect information on a rotational angle precisely, and a device thus constituted can be applied to an angle detector, a small-sized rotary encoder, etc., which are small in size and have a high resolution.</p> |
