POSITIVE TYPE RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To provide a positive type radiation sensitive resin compsn. useful as a resist especially excellent in focus latitude and also excellent in sensitivity, resolution, residual film rate, developability, pattern shape and heat resistance. CONSTITUTION:This positive type radiation sensitive resin compsn. contains alkali-soluble novolak resin and quinonediazidosulfonic ester of a copolymer of phenols with dicyclopntadiene.